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white light interferometers displacement / thickness sensor

Model: interferoMETER 5400 / 5420

Category: Key Components

Exhibitor: MICRO-EPSILON TAIWAN CO., LTD.

Booth No: K1008

Characteristic

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.

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